Keyence VR-6100 3D Optical Profiler

Model: VR-6100
Type: Head Unit (Standard Model)
Controller: VR-6000
Operating System: Windows 10 Professional / Windows 11 Professional

Optical & Measurement Specifications

Zoom Range: 1× to 4×

Display Resolution: 0.1 μm

Field of View (Horizontal × Vertical):

24.0 × 18.0 mm (12× magnification)

12.0 × 9.0 mm (25×)

8.0 × 6.0 mm (38×)

7.6 × 5.7 mm (40×)

6.0 × 4.5 mm (50×)

3.8 × 2.9 mm (80×)

2.5 × 1.9 mm (120×)

1.9 × 1.4 mm (160×)

Height Measurement Range

Without Z Stitching:

Low Mag (wide FOV): 10 mm (0.39″)

High Mag (high res): 1 mm (0.04″)

With Z Stitching:

Low Mag (wide FOV): 50 mm (1.97″)

High Mag (high res): 30 mm (1.18″)

Measurement Accuracy

Height:

Without Z Stitching: ±2.5 μm

With Z Stitching: ±4.0 μm

Repeatability (σ):

Without Z Stitching: 0.4 μm

With Z Stitching: 1.0 μm

Width:

Low Mag (wide FOV): ±5 μm

High Mag (high res): ±2 μm

Stage Specifications

XY Measurable Range: 92 × 86 mm (3.62″ × 3.39″) with VR-H4J module

XY Stroke: 70 × 70 mm (2.76″ × 2.76″) manual

Z Stroke: 69 mm (2.72″) motorized

Load Capacity: 4.5 kg (9.92 lb)

Working Distance: 75 mm (2.95″)

Optics & Illumination

Image Sensor: 4-megapixel monochrome CMOS

Transmitter Lens: Double-telecentric lens × 2

Receiver Lens: Double-telecentric lens

Observation Light Source: LED ring (red, blue, green)

Measurement Light Source: White LED

System & Power

Data Processing: Dedicated PC specified by Keyence

Power Supply: 100–240 VAC ±10%, 50/60 Hz

Power Consumption: 200 VA max

Environmental Conditions

Temperature: +15 to +30°C (59 to 86°F)

Humidity: 20 to 80% RH (no condensation)

Physical

Weight: Approx. 25 kg (55.12 lb) total

Measurement Unit Only: Approx. 11 kg (24.25 lb)

**SPEC SHEET AVAILABLE BY REQUEST**