JF
16973827670
Plasma Etch BT-1 Tumbler, Industrial Batch Processing System
$11,900.00
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Electrode Configuration:
24” Diameter x 26” Deep Rotating Basket Including Electronic Jog/Speed Control
Generator:
1200W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network
Gas Control:
Two 0-500cc Mass Flow Controllers
Control System:
Color PLC-Based Touch Screen Control Interface with Multiple Recipe Storage
Vacuum Gauge:
1-2000 mT
Vacuum Pump:
59CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
355CFM Roots Booster:
3 Micron Oil Filtration System
Chamber Material:
6061-T6 Aluminum
Unit Dimensions
70″x36”x32”
Made in the U.S.A.