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JF
16973827670

Plasma Etch BT-1 Tumbler, Industrial Batch Processing System

$11,900.00

This specific product is no longer available, however we may have other similar or identical products in stock. Please utilize our search function at the top of the page to check and confirm, or fill out the form below:

Electrode Configuration:
24” Diameter x 26” Deep Rotating Basket Including Electronic Jog/Speed Control

Generator:
1200W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network

Gas Control:
Two 0-500cc Mass Flow Controllers

Control System:
Color PLC-Based Touch Screen Control Interface with Multiple Recipe Storage

Vacuum Gauge:
1-2000 mT

Vacuum Pump:
59CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

355CFM Roots Booster:
3 Micron Oil Filtration System

Chamber Material:
6061-T6 Aluminum

Unit Dimensions
70″x36”x32”

Made in the U.S.A.