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Plasma Etch BT-1 Tumbler, Industrial Batch Processing System


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Electrode Configuration:
24” Diameter x 26” Deep Rotating Basket Including Electronic Jog/Speed Control

1200W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network

Gas Control:
Two 0-500cc Mass Flow Controllers

Control System:
Color PLC-Based Touch Screen Control Interface with Multiple Recipe Storage

Vacuum Gauge:
1-2000 mT

Vacuum Pump:
59CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

355CFM Roots Booster:
3 Micron Oil Filtration System

Chamber Material:
6061-T6 Aluminum

Unit Dimensions

Made in the U.S.A.